Shaanxi KeGu New Material Technology Co., Ltd

Shaanxi KeGu New Material Technology Co., Ltd

Manufacturer from China
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Aluminum Oxide Ceramic Robot Arm / Claw / Finger For Semiconductor Wafer

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Shaanxi KeGu New Material Technology Co., Ltd
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City:chaoyang
Province/State:Shaanxi
Country/Region:china
Contact Person:MsYuki
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Aluminum Oxide Ceramic Robot Arm / Claw / Finger For Semiconductor Wafer

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Brand Name :KEGU
Place of Origin :China
Price :200-500 yuan/kg
Payment Terms :L/C,D/A,D/P,T/T,Western Union,MoneyGram
Supply Ability :2,000 pcs/month
Packaging Details :Strong wooden box for Global shipping
Model Number :Customizable
Material :SiC
Composition:SiC :>85%
Color :Black
Density :≥3.65g/cm3
Max. Service Temp :1380℃
Flexural Strength :250MPa
Hardness :≥84HRA
Water Absorption :≤0.2%
Abrasion :< 0.02%
Bending strength :≥290MPa
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High Quality Ceramic arm/ Ceramic Claw / Ceramic Finger

The robot arm handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.

Manufacturing Processes:

Aluminum Oxide Ceramic Robot Arm / Claw / Finger For Semiconductor Wafer

Main applications:

  • Components for semiconductor equipment
  • Pates
  • Rings
  • Gas distribution plates
  • Nozzles
  • Cover plates
  • RF windows
  • Domes
  • Substrates
  • Insulation parts

Key features&Specifications:

  • Wide variety of shaping options:
  • hot pressing
  • CIP
  • gelcasting
  • dry pressing etc.
  • Up to diameter of 650mm
  • Very low porosity
  • Ultra chemical resistant
  • Direct sintered to allow for net shape sintering
  • Large size capcibility (up to 4 meter)

Quality Control:

Aluminum Oxide Ceramic Robot Arm / Claw / Finger For Semiconductor Wafer

Ceramic Arm/Ceramic Claw/Ceramic Finger:

Aluminum Oxide Ceramic Robot Arm / Claw / Finger For Semiconductor Wafer

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